PRODUCTION OF BURIED WAVE-GUIDES IN PMMA BY HIGH-ENERGY ION-IMPLANTATION

Authors
RUCK DM BRUNNER S TINSCHERT K FRANK WFX
Citation
Dm. Ruck et al., PRODUCTION OF BURIED WAVE-GUIDES IN PMMA BY HIGH-ENERGY ION-IMPLANTATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 106(1-4), 1995, pp. 447-451
Citations number
8
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
106
Issue
1-4
Year of publication
1995
Pages
447 - 451
Database
ISI
SICI code
0168-583X(1995)106:1-4<447:POBWIP>2.0.ZU;2-H
Abstract
Optical waveguiding structures in PMMA were produced by irradiation wi th ions in the dose range of 10(12)-10(14) ions/cm(2). Waveguides buri ed in various depths of the bulk material were generated using ions wi th different energies between 100 keV and 180 MeV. Optical devices suc h as Y-branches, couplers and Mach-Zehnder interferometers were produc ed using ion irradiation through a mask. The refractive index and prof ile as well as the attenuation of the waveguides were measured at diff erent wavelengths. These properties of the waveguiding structures at d ifferent depths of the bulk material will be discussed.