MICROMACHINED FABRY-PEROT CAVITY PRESSURE TRANSDUCER

A surface micromachined Fabry-Perot cavity used as a pressure sensor h as been fabricated using standard IC technology, Dielectric film stack s consisting of layers of Silicon dioxide and silicon nitride were use d as mirrors, Polysilicon was used as a sacrificial layer that was the n removed to form an air gap cavity. The Fabry-Perot,sensor was optica lly interrogated using a multimode optical fiber, The measured respons e of the sensor agrees well with theoretical simulation, which takes i nto account the averaging effect caused by the shape of the deflected mirror in the cavity.