A new MMIC compatible sensor that measures RF power transmitted over a
50 Omega coplanar waveguide is presented. ?he sensor is based on the
thermoelectric effect in AlGaAs [1] and GaAs/AlGaAs micromachining tec
hnology is used for realisation. A sensitivity of 1.1V/W has been achi
eved with a reflection coefficient of 0.1 at 10GHz, by a first realisa
tion.