ELECTROOPTIC PROBING OF RF SIGNALS IN SUBMICROMETER MMIC DEVICES

Authors
DAVID G BUSSEK P AUER U TEGUDE FJ JAGER D
Citation
G. David et al., ELECTROOPTIC PROBING OF RF SIGNALS IN SUBMICROMETER MMIC DEVICES, Electronics Letters, 31(25), 1995, pp. 2188-2189
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
31
Issue
25
Year of publication
1995
Pages
2188 - 2189
Database
ISI
SICI code
0013-5194(1995)31:25<2188:EPORSI>2.0.ZU;2-J
Abstract
A high resolution electro-optic measurement system for probing RF elec tric field distributions in submicrometre MMIC devices is presented. A s an example, field distributions in an interdigital structure are dis played, revealing a spatial resolution of much less than 0.5 mu m. Thi s feature makes electro-optic probing a unique technique for circuit- and also device-internal measurements of electrical signals combining high bandwidth and noninvasiveness with submicrometre resolution.