A MODEL OF A LARGE-AREA PLANAR PLASMA PRODUCER BASED ON SURFACE-WAVE PROPAGATION IN A PLASMA-METAL STRUCTURE WITH A DIELECTRIC SHEATH

A theoretical model of a large-area planar plasma producer based on su rface wave (SW) propagation in a plamsa-metal structure with a dielect ric sheath is presented. The SW which produces and sustains the microw ave gas discharge in the planar structure propagates along an external magnetic field and possesses an eigenfrequency within the range betwe en electron cyclotron and electron plasma frequencies. The spatial dis tributions of the produced plasma density, electromagnetic fields, ene rgy flow density, phase velocity and reverse skin depth of the SW are obtained analytically and numerically.