CALIBRATION OF REM WITH ELIMINATION OF SYSTEMATIC LINEAR-GAUGE ERROR

Authors
NOVIKOV YA RAKOV AV STEKOLIN IY
Citation
Ya. Novikov et al., CALIBRATION OF REM WITH ELIMINATION OF SYSTEMATIC LINEAR-GAUGE ERROR, Measurement techniques, 38(3), 1995, pp. 352-355
Citations number
8
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
38
Issue
3
Year of publication
1995
Pages
352 - 355
Database
ISI
SICI code
0543-1972(1995)38:3<352:CORWEO>2.0.ZU;2-O
Abstract
A method of calibrating a raster electron microscope with the aid of l inear gauges in the form of rectangular slit-like grooves that elimina tes the unaccounted for systematic error of the usual linear gauges is examined. It is demonstrated that in the dimensions of slit-like stru ctures in silicon created at the IOF RAN, systematic error (greater th an 2 nm) is absent.