ELECTROSTATIC MICROMOTOR OPTIMIZATION USI NG AN ANALYTICAL MODEL

Since electrostatic motors require very high voltages and do not exert great efforts on the usual dimensional scale, their design and optimi sation are not well-known. But on the millimeter and micrometer scales , this kind of motor seems to present interesting qualities. The optim isation of electrostatic micromotors is generally based on the use of numerical finite element methods. Because of the numerous possible geo metrical combinations, this type of optimisation takes a lot of time a nd must be reperformed for each application. In this paper, we present an optimisation of variable capacitance motors based solely on an ana lytical model of the stator/rotor capacity. For each application, this model allows determining the optimal geometrical dimensions of the el ectrostatic micromotor depending on the fabrication process used.