P. Midy et I. Brissaud, APPLICATION OF A NEW ALGORITHM TO DEPTH PROFILING BY PIXE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 103(4), 1995, pp. 489-493
We propose a new method for concentration profile determination using
the PIXE technique at different proton energies. The classical deconvo
lution process involved is solved by a singular value decomposition of
the ill-conditioned matrix obtained by discretization. The mathematic
al tool is outlined. Different applications are shown and a comparison
with other techniques is presented.