OBSERVATION OF DIAMOND NANOCRYSTALS IN CARBON-FILMS DEPOSITED DURING ION-ASSISTED MICROWAVE PLASMA NUCLEATION PRETREATMENTS

Diamond nanocrystals were observed in carbon films deposited by ion-as sisted microwave plasma pretreatments for diamond thin films. Both sel ected-area electron diffraction and x-ray diffraction confirm the pres ence of diamond in the bias-deposited carbon films despite micro-Raman spectra and scanning electron micrographs which do not provide conclu sive evidence of this carbon phase. These analyses indicate that carbo n deposited by the ion-assisted nucleation process consists of a high density of nanocrystalline diamond nuclei in a nondiamond carbon matri x. Subsequent growth of these nuclei using unbiased microwave plasma c hemical-vapor deposition leads to the formation of relatively smooth a nd thin continuous polycrystalline diamond films with small grain size s. (C) 1995 American Institute of Physics.