SIMULATION OF THE CRYSTALLIZATION OF THIN-FILMS BY RAPID THERMAL-PROCESSING

A computer simulation has been performed of phase transformations taki ng place in thin films under various time-temperature regimes. The con ditions used resemble those encountered in the rapid thermal processin g of thin films. The effect of heating rate and final temperature have been studied in detail. It is observed that the two parameters can st rongly influence the grain size and the grain size distribution within the films. The feasibility of using multiple step rapid thermal proce ssing to optimize thin film microstructure is demonstrated. (C) 1996 A merican Institute of Physics.