J. Zendehroud et al., DETERMINATION OF STRESS TENSORS IN THIN TEXTURED COPPER-FILMS BY GRAZING-INCIDENCE DIFFRACTION, Materialwissenschaft und Werkstofftechnik, 26(10), 1995, pp. 553-559
Ion-platted thin copper films were examined for residual stresses and
texture by X-ray diffraction. The complete orientation distribution fu
nctions were determined and sharp (Ill)-fibre textures were found. The
strains were measured by grazing incidence diffraction. The stress te
nsors were calculated using both texture-weighted elastic compliances
and texture-independent X-ray elastic constants. The importance of the
texture measurement for the stress tensor determination is discussed.
The found stresses can be interpreted as thermally induced.