THE EQUIVALENT-CURRENT METHOD IN THE ELLIPSOMETRY OF INHOMOGENEOUS SURFACE-STRUCTURES

This paper discusses the problem of the interaction of polarized radia tion with an inhomogeneous-layer-substrate structure. The equivalent-c urrent method used is new for ellipsometry. The concept of cross-equiv alent currents is introduced. Integral field equations are obtained th at completely coincide with those derived using a Green's function. It is shown that the proposed approach is more universal and can be used to solve a number of other problems. (C) 1995 The Optical Society of America.