SILICON-MICROMACHINED MICROMIRRORS WITH INTEGRATED HIGH-PRECISION ACTUATORS FOR EXTERNAL-CAVITY SEMICONDUCTOR-LASERS

We present an actuated silicon-micromachined micromirror with continuo us and highly accurate position adjustment designed to be used in the construction of external-cavity semiconductor-laser modules. In our in itial design, a positioning accuracy better than +/-0.2 mu m for the a ctuated micromirrors is obtained. The mechanical robustness, small siz e, and fine-positional precision of the actuated micromirrors are suff icient for external cavity-laser applications. In production, the cost of these miniature external-cavity-laser systems should be low becaus e they are batch-processed.