EFFECTS OF INTERFACE TRAPS AND BORDER TRAPS ON MOS POSTIRRADIATION ANNEALING RESPONSE

Threshold-voltage and charge-pumping measurements are combined to esti mate densities of radiation-induced bulk-oxide, interface, and border traps in transistors with soft 45-nm oxides. Immediately after irradia tion, nearly all effects usually attributed to interface traps are act ually due to border traps in these devices. During positive-bias annea l at 80 degrees C, the interface-trap density grows by more than a fac tor of 10, and the border-trap density changes by less than 30%. The i ncrease in interface-trap density is matched by a decrease in bulk-oxi de-trap charge. This raises the possibility that slowly transporting o r trapped protons in the oxide may be responsible for this effect. An alternate explanation is offered by H-cracking models. Latent ''interf ace-trap'' growth in harder 27.7-nm oxides is associated with (true) i nterface traps, not border traps. Switched-bias annealing of the soft 45-nm oxides reveals fast and slow border traps with different anneali ng responses. Trivalent Si defects associated with O vacancies in SiO2 , the E(gamma)' center and the O3-xSixSi . family, are excellent candi dates for slow and fast border traps, respectively. For O3-xSixSi . x = 0 is the E(x)' defect; x = 3 is the D center; and x = I or 2 have be en proposed as candidates for the ((P-bl)) defect on (100) Si. A hydro gen-related complex (e. g., OH-) may also be a border trap. The practi cal significance of these results is discussed for (1) bias-temperatur e instabilities in thin oxides, (2) effects of burn-in on MOS radiatio n response, and (3) enhanced bipolar gain degradation at low dose rate s.