EXPERIMENTAL CHARGE FRACTIONS AND ANGULAR-DISTRIBUTIONS OF PARTICLES SCATTERED IN NE+ SI INTERACTIONS/

Low energy ion scattering spectroscopy by a time of night technique ha s been used to study both the angular distributions and the charge fra ctions of particles scattered in collisions of 4 keV Ne+ ions with amo rphous silicon. The angular distributions versus the scattering angle at near grazing incidence display for both single (QSS) and total scat tering events a shift towards high scattering angles of the ion distri bution maximum relative to the neutral curves. The experimental distri butions were compared to computer simulation (MARLOWE) profiles for tw o incidence angles. Ne+ charge fractions versus the scattering angle t heta were determined; for near grazing incidence, charge fractions as high as 70% are measured for the QSS event. At a constant scattering a ngle (theta = 60 degrees), a decrease of the Ne+ charge fraction as a function of the incidence angle is observed; this result illustrates t he neutralization probability, inside the target, taking place after t he violent collision.