ALUMINUM-HYDRIDE COMPOUNDS AS PROMISING AGENTS FOR PRODUCING ULTRAPURE SILICON

A survey is given of the modern state of chemistry of aluminum hydride compounds in the context of prospects of their use for producing sila ne and semiconductor-grade silicon from silicon tetrafluoride. The gen eral characteristics of aluminum hydride compounds are given, anal the ir synthesis methods and data on thermodynamic, chemical, and thermal stability are discussed. Special attention is given to reactions of al uminum hydride compounds with silicon tetrafluoride and volatile fluor ides and hydrides of the main concomitant elements.