SILICON-CONTAINING NAPHTHOQUINONE DIAZIDES - LIGHT-SENSITIVE COMPONENTS OF RESIST FORMULATIONS WITH IMPROVED ADHESION

Authors
RUDAYA LI BOGOLYUBOVA SS KLIMOVA NV
Citation
Li. Rudaya et al., SILICON-CONTAINING NAPHTHOQUINONE DIAZIDES - LIGHT-SENSITIVE COMPONENTS OF RESIST FORMULATIONS WITH IMPROVED ADHESION, Russian journal of applied chemistry, 68(1), 1995, pp. 96-99
Citations number
6
Categorie Soggetti
Chemistry Applied
Journal title
Russian journal of applied chemistry → ACNP
ISSN journal
10704272
Volume
68
Issue
1
Year of publication
1995
Part
2
Pages
96 - 99
Database
ISI
SICI code
1070-4272(1995)68:1<96:SND-LC>2.0.ZU;2-1
Abstract
Silicon-containing 2,1-diazonaphthalenonesulfonamides, which are light -sensitive components of resist formulations with high adhesion, have been prepared.