DESIGN AND FABRICATION OF SURFACE TRANSVE RSE-WAVE RESONATORS WITH THIN METAL STRIPS DEPOSITED ON QUARTZ SUBSTRATES

Using a theoretical model of surface transverse wave propagation on pi ezoelectric substrates under shallow groove or thin metal strip gratin gs, a theoretical method for predicting the resonance frequency of a s urface transverse wave resonator is proposed. This method is based on a transmission line model which allows to take into account the physic al properties of each component of the resonator. This theoretical app roach is used to predict the sensitivity of the resonance frequency to different technological design parameters of the resonator (cut angle of the substrate, grating's dimensions, thickness of the strips, etc) . The practical implementation of these devices on quartz substrates a llows to compare theoretical predictions and experimental results. It is then possible to emphasize the improvements of theoretical predicti ons when using piezoelectric model of surface transverse wave propagat ion.