HYDROGEN PLASMA DEGRADATION OF SNO2F FILMS PREPARED BY THE APCVD METHOD

Degradation of textured SnO2:F films in glow-discharge hydrogen plasma s at different temperatures and for different times of exposure has be en investigated. After exposure, measurement of transmittance and refl ectance spectra, scanning electron micrograph observation and Auger an alysis have been carried out to determine the extent of degradation. I t has been found that the NIR reflectance spectra are sensitive to min ute superficial changes, which are not reflected in the visible transm ittance spectra and can be used to obtain plasma durability thresholds in textured SnO2:F films. The haze value, measured by a haze meter ma y not necessarily be an indication of the true surface morphology of a film and its quality.