DESIGN AND CHARACTERIZATION OF A SINGLE-REFLECTION, SOLID-STATE DETECTOR WITH HIGH DISCRIMINATION AGAINST BACKSCATTERED ELECTRONS FOR CATHODOLUMINESCENCE-MICROSCOPY
Kl. Pey et al., DESIGN AND CHARACTERIZATION OF A SINGLE-REFLECTION, SOLID-STATE DETECTOR WITH HIGH DISCRIMINATION AGAINST BACKSCATTERED ELECTRONS FOR CATHODOLUMINESCENCE-MICROSCOPY, Scanning, 18(1), 1996, pp. 35-44
A portable solid-state detector (SSD) for cathodoluminescence (CL) has
been constructed and tested. The detector geometry utilises a parabol
ic, reflector to direct light towards the solid-state detection elemen
t. The photo-sensitive area of the solid-state photodiodes is situated
at a level in line with or sightly below the top surface of the speci
men to minimise the collection of backscattered electrons (BSEs) comin
g directly from the beam impact point. The components have been integr
ated into a single unit to enhance portability. In comparison with a c
ommercial CL detection system, the new geometry shows excellent effici
ency in rejecting BSE contribution during CL operation. A light collec
tion solid angle close to 1.97 pi steradian is realised in this geomet
ry, higher than other SSD-CL systems. A method for characterising CL d
etection system performance has been developed.