SUPERLATTICES OF PBZRO3 AND PBTIO3 PREPARED BY MULTI-ION-BEAM SPUTTERING

Artificial superlattices consisting of antiferroelectric PbZrO3 (PZO) and ferroelectric PbTiO3 (PTO) have been fabricated by a multi-ion-bea m sputtering technique. The epitaxial PZO and PTO layers were sequenti ally grown on (100)Pt/MgO substrates at a low substrate temperature of 415 degrees C with a periodicity from 5 to 100 perovskite unit cells. X-ray diffraction studies revealed the superlattice structures with a -axis oriented PTO layers on a-axis oriented PZO layers. The dielectri c and ferroelectric properties of the superlattice films were enhanced with increasing periodicity. (C) 1996 American Institute of Physics.