LASER ACTIVATION OF DIAMOND FILMS FOR ELECTROLESS METAL PLATING - VALENCE-BAND MODIFICATIONS

Experimental results are presented on the modification of the valence band of diamond under a KrF excimer laser etching in the process of th e activation of a diamond film surface for electroless copper plating. The Auger electron spectroscopy (AES) is used to obtain the valence-b and density-of-states spectra of the diamond film before and after las er treatment. According to AES data, a characteristic feature of the l aser-treated diamond surface is the appearance of nonzero density of s tates in the gap of diamond which promotes the electron transfer from the reducing agent to the metal ion during electroless deposition. The results are also discussed on the electroless metallization of diamon d films under a load-induced activation of the film surface with a dia mond indentor. (C) 1996 American Institute of Physics.