ANALYSIS OF EDDY-CURRENT EFFECTS IN AN ELECTRON-OPTICAL COLUMN

A new simple method for analyzing eddy currents caused by magnetic def lection in an electron optical column is proposed. This method can be used to calculate the magnetic deflection error caused by eddy current s by changing the magnetic permeability in the optical column between zero and normal permeability. These magnetic permeabilities correspond to the initial and the final states after magnetic deflection. Tile d eflection error is calculated using the deflection sensitivity and rot ation seisitivity which is simulated from flux density distribution of the magnetic deflector. Good agreement was obtained between simulatio n and experiment.