VELOCITY OF SPRAY-COATING OF TITANIUM NIT RIDE FILMS IN JET-SPRAYING MAGNETOTRON STATIONS

Authors
VLADIMIROV VV PANCHENKO OA
Citation
Vv. Vladimirov et Oa. Panchenko, VELOCITY OF SPRAY-COATING OF TITANIUM NIT RIDE FILMS IN JET-SPRAYING MAGNETOTRON STATIONS, Pis'ma v Zurnal tehniceskoj fiziki, 21(9), 1995, pp. 37-40
Citations number
5
Categorie Soggetti
Physics, Applied
Journal title
Pis'ma v Zurnal tehniceskoj fiziki → ACNP
ISSN journal
03200116
Volume
21
Issue
9
Year of publication
1995
Pages
37 - 40
Database
ISI
SICI code
0320-0116(1995)21:9<37:VOSOTN>2.0.ZU;2-9