EFFECT OF ELECTROCHEMICAL POLARIZATION ON OPTICAL-PROPERTIES OF SPUTTER-PREPARED TIN NITRIDE IN AQUEOUS-ELECTROLYTE

Tin nitride thin films were prepared by radio-frequency (RF) reactive sputtering. The metallic tin target was sputtered by nitrogen gas with RF magnetron sputtering equipment. Transparent polycrystalline SnNx t hin films were obtained at an RF power of 50 W. On application of -3.0 V in a 1.0 MNa(2)SO(4) solution, SnNx decomposed into Sn through a re action with a proton. On subsequent application of +3.0 V, Sn dissolve d into the aqueous solution, until inactive SnO2 was formed at the sur face of the Sn. These irreversible changes were accompanied by an incr ease and a decrease in optical absorption.