S. Ottow et al., PROCESSING OF 3-DIMENSIONAL MICROSTRUCTURES USING MACROPOROUS N-TYPE SILICON, Journal of the Electrochemical Society, 143(1), 1996, pp. 385-390
A process for micromachining arbitrary structures with high aspect rat
ios in bulk silicon utilizing standard microelectronic processes is pr
esented. It is based on electrochemical macropore formation on n-type
silicon in electrolytes containing hydrofluoric acid. Very regular por
e arrays with pore diameters and distances in the micrometer range and
pore lengths of several hundred micrometers can be produced with this
technique. Wafers with suitable prefabricated pore arrays are used as
substrates for a micromachining process including anisotropic etching
of very deep structures yielding straight walls to depths of as much
as 150 mu m.