Im. Essa et al., IR, ESCA AND AUGER ANALYSIS OF THERMALLY HYDROGENATED A-SI-H THIN-FILMS, Solar energy materials and solar cells, 39(1), 1995, pp. 19-25
Hydrogenated amorphous silicon thin films have been prepared by therma
l evaporation. IR investigations showed the existence of all expected
Si-H. The electron spectroscopy for chemical analysis exhibited the ex
istence of oxygen and carbon atoms on the silicon surface which led to
a shift in the Si2p core level. Auger spectroscopy also exhibited a p
eak shift in the kinetic energy. Both shifts are interpreted on the ba
ses of the environmental change in the amorphous structure.