IR, ESCA AND AUGER ANALYSIS OF THERMALLY HYDROGENATED A-SI-H THIN-FILMS

Citation
Im. Essa et al., IR, ESCA AND AUGER ANALYSIS OF THERMALLY HYDROGENATED A-SI-H THIN-FILMS, Solar energy materials and solar cells, 39(1), 1995, pp. 19-25
Citations number
17
Categorie Soggetti
Energy & Fuels","Material Science
ISSN journal
09270248
Volume
39
Issue
1
Year of publication
1995
Pages
19 - 25
Database
ISI
SICI code
0927-0248(1995)39:1<19:IEAAAO>2.0.ZU;2-W
Abstract
Hydrogenated amorphous silicon thin films have been prepared by therma l evaporation. IR investigations showed the existence of all expected Si-H. The electron spectroscopy for chemical analysis exhibited the ex istence of oxygen and carbon atoms on the silicon surface which led to a shift in the Si2p core level. Auger spectroscopy also exhibited a p eak shift in the kinetic energy. Both shifts are interpreted on the ba ses of the environmental change in the amorphous structure.