MEASUREMENT OF LINEAR DIMENSIONS OF SUBMICRON STRUCTURES WITH A SCANNING ELECTRON-MICROSCOPE

Authors
DANILOV VA NOVIKOV YA RAKOV AV STEKOLIN IY
Citation
Va. Danilov et al., MEASUREMENT OF LINEAR DIMENSIONS OF SUBMICRON STRUCTURES WITH A SCANNING ELECTRON-MICROSCOPE, Measurement techniques, 38(4), 1995, pp. 398-402
Citations number
14
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
38
Issue
4
Year of publication
1995
Pages
398 - 402
Database
ISI
SICI code
0543-1972(1995)38:4<398:MOLDOS>2.0.ZU;2-#
Abstract
A scanning electron microscope, operating in conditions of secondary s low-electron collection, was used to measure the dimensions of raised rectangular structures in the form of 90-500 nm slit-like groves in si licon. The average measurement error was 0.5-1%.