EFFECTS OF ENGINEERING TOLERANCES ON THE ERROR OF A PLANAR CAPACITANCE DISPLACEMENT SENSOR

Authors
KRUCHININ ML
Citation
Ml. Kruchinin, EFFECTS OF ENGINEERING TOLERANCES ON THE ERROR OF A PLANAR CAPACITANCE DISPLACEMENT SENSOR, Measurement techniques, 38(4), 1995, pp. 407-410
Citations number
3
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
38
Issue
4
Year of publication
1995
Pages
407 - 410
Database
ISI
SICI code
0543-1972(1995)38:4<407:EOETOT>2.0.ZU;2-R
Abstract
The paper discusses the effects of manufacturing tolerances on the lin earity errors of a planar capacitative displacement sensor. A numerica l evaluation is given together with working formulas for the effects o f gap taper in the working electrodes, the curvature of the inner edge s of these electrons, and taper in the outer edges.