POROUS SILICON - A NOVEL MATERIAL FOR MICROSYSTEMS

Authors
LANG W STEINER P SANDMAIER H
Citation
W. Lang et al., POROUS SILICON - A NOVEL MATERIAL FOR MICROSYSTEMS, Sensors and actuators. A, Physical, 51(1), 1995, pp. 31-36
Citations number
19
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
51
Issue
1
Year of publication
1995
Pages
31 - 36
Database
ISI
SICI code
0924-4247(1995)51:1<31:PS-ANM>2.0.ZU;2-D
Abstract
A porous layer is generated by electrochemical dissolution of silicon in HE This new material has some very interesting applications in micr ostructuring, sensories, microelectronics and microoptics. The etching process and the morphology of porous silicon are described. Possible applications are discussed.