Na. Bert et al., SPATIAL ORDERING OF ARSENIC CLUSTERS IN GAAS-LAYERS GROWN BY MOLECULAR-BEAM EPITAXY AT LOW-TEMPERATURE, Semiconductors, 29(12), 1995, pp. 1170-1171
It is shown that two-dimensional layers of nanosize arsenic clusters,
separated by a GaAs matrix which does not contain clusters, can be for
med by means of delta-doping with indium in GaAs films grown by molecu
lar-beam epitaxy at low temperature (200 degrees C). Spatially-ordered
cluster structures were obtained in epitaxial GaAs films doped with S
i donors and Be accepters as well as films which were not doped with e
lectrically-active impurities, (C) 1995 American Institute of Physics.