G. Decicco et al., ELASTIC SURFACE-WAVE DEVICES BASED ON PIEZOELECTRIC THICK-FILMS, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 43(1), 1996, pp. 73-77
A study has been performed for the development of elastic-waves struct
ures, involving screen printed and fired piezoelectric layers on nonpi
ezoelectric substrates, intended for new families of thick film sensor
s. This study approached the electroacoustic effects, i.e., the coupli
ng between electromechanical. parameters of the layers and elastic pro
perties of the substrate, related to the wave propagation. In this wor
k, particular attention is devoted to devices implemented on alumina s
ubstrates where SAW as well as (symmetric and antisymmetric) Lamb's wa
ves are generated. The realization processes and the performance chara
cteristics of these structures are presented.