AN APPARATUS FOR MULTIPARAMETRIC STUDIES OF ION-SURFACE COLLISIONS

This paper describes the design and tests of an ultrahigh vacuum appar atus built for the study of particle surface interactions, with emphas is on ion scattering experiments. The system was designed to provide f acilities for angle resolved electron spectroscopy, ion scattering spe ctroscopy (ISS), Auger electron spectroscopy (AES), and ultraviolet ph otoelectron spectroscopy (UPS). It has provisions for photon spectrosc opy and fixed angle time-of-flight (TOF) scattering and recoiling spec trometry. Mass selected ion beams in the energy range from a few eV to a few keV can be produced in a continuous or pulsed mode. Two indepen dent, parallel plate tandem electrostatic analyzers, which can rotate around the sample are employed. The angular range spanned is analysis- type dependent and varies from 0 degrees to 135 degrees. One of the an alyzers was designed for low energy secondary electron spectroscopy (0 -100 eV) and the other one for ISS and AES measurements in the energy range from a few eV tp 5 keV. The system disposes of a Czemy-Turner mo nochromator for optical spectroscopy in the visible. TOF analysis can be performed for 7 degrees and 38 degrees scattering angles and a flig ht length of 2.2 m. Alternatively, a large area detector set at 20 cm from the collision center allows TOF and charge fraction measurements over an angular range from 0 degrees to 110 degrees. We describe vario us tests of the different components of the apparatus and some results of experiments on ion scattering. (C) 1996 American Institute of Phys ics.