The submicrometer length scale is mostly beyond the resolution of clas
sical tribometers. The Scanning Force and Friction Microscope operated
as a nanotribometer is a suitable tool for the investigation of nanot
ribological properties. The Scanning Force and Friction Microscope mea
sures simultaneously forces normal and parallel to the sample surface
with a resolution down to the atomic scale. The setup of a Scanning Fo
rce Microscope based nanotribometer, its calibration and the methods f
or quantitative data analysis are discussed. It is shown that a two-di
mensional histogram analysis yields quantitative data on the distribut
ion of the indium on a nanometer scale. The concepts are applied to th
e analysis of a silicon oxide surface with indium clusters are discuss
ed. The chemical sensitivity of the Scanning Force and Friction Micros
cope operated under ambient condition makes this instrument a promisin
g candidate for a standardized tool in nanotribology.