FABRICATION OF AN ELECTROSTATIC WOBBLE MICROMOTOR USING DEEP-ETCH UV LITHOGRAPHY, NICKEL ELECTROFORMING AND A TITANIUM SACRIFICIAL LAYER

A new electrostatic micromotor structure is presented in this paper. T he actuation principle is based on the wobbling effect due to the use of direct electrostatic forces. A theoretical evaluation of the princi pal characteristics of the motor is presented. The motor is designed t o present a low rotation speed (some 10 rotations per minute) suitable for direct actuation without speed reduction. The microfabrication te chnology used to realize the motor is based on deep-etch UV lithograph y, a nickel electroformed rotor and a titanium sacrificial layer. The flow chart of the technological steps implemented is detailed. First e xperimental results and improvements of the motor are discussed.