FIELD-EMITTER CATHODE FOR ACCELERATION SENSORS

Vacuum microelectronics is an emerging and rapidly evolving technology . Characterized by field emission in vacuum microchambers, it has foun d applications in the display field, and more recently in sensor techn ology. In this paper we seek to report on a novel multidimensional met hod of utilizing field emission in acceleration sensors. Emission curr ents are directly related to, among other parameters, the distance sep arating the emission cathode and anode. When either or both electrodes are micromachined in a cantilever beam capable of deflection under th e influence of an external force, the emission current detected will b e a direct measure of force magnitude. Furthermore, we propose a desig n that will allow measurements of force components in three-dimensions . We present details of fabrication methods and theoretical concepts d escribing the mechanism proposed.