POLYMER FILM THICKNESS DETERMINATION WITH A HIGH-PRECISION SCANNING REFLECTOMETER

Citation
Ph. Shelley et al., POLYMER FILM THICKNESS DETERMINATION WITH A HIGH-PRECISION SCANNING REFLECTOMETER, Applied spectroscopy, 50(1), 1996, pp. 119-125
Citations number
13
Categorie Soggetti
Instument & Instrumentation",Spectroscopy
Journal title
ISSN journal
00037028
Volume
50
Issue
1
Year of publication
1996
Pages
119 - 125
Database
ISI
SICI code
0003-7028(1996)50:1<119:PFTDWA>2.0.ZU;2-X
Abstract
A fiber-optic-based optical low coherence reflectometer (OLCR) is used to measure the thickness of polyester films. The measurements are mad e on both stationary and moving films to show the feasibility of this technique in a process environment. Autocorrelation is used to extract useful data from raw reflectometry data, and a statistical analysis o f the data from both moving and stationary films is done to help demon strate the application of this method. Although the reflectometer is n ot optimally configured for process analysis, a reliable estimate of p olymer film thickness is shown in less than one minute measurement tim e for the moving films.