High-resolution electron microscopy technique has been applied to a de
tailed study of the 60 degrees dislocations at the atomic layer molecu
lar-beam-epitaxial GaAs/Si interface. Their deformation fields strongl
y interact with neighbor dislocations inducing irregular spacing betwe
en the cores and possible dissociations. Biatomic silicon steps were o
bserved at the interface, but never inside 60 degrees dislocation core
s. Computer image simulation and elasticity calculations of the atomic
displacement field have been used in order to determine the structure
of the 60 degrees dislocation; however, due to the Eshelby effect and
to interaction with some neighbor dislocations, in many cases no theo
retical model could explain some observations. (C) 1996 American Insti
tute of Physics.