AUTOMATIC MASK ALIGNMENT IN THE THETA-DIRECTION USING MOIRE SENSORS

Authors
LIU J FURUHASHI H TORII A SHARMA R CHITNIS VT SINGH BP YAMADA J UCHIDA Y
Citation
J. Liu et al., AUTOMATIC MASK ALIGNMENT IN THE THETA-DIRECTION USING MOIRE SENSORS, Nanotechnology, 6(4), 1995, pp. 135-138
Citations number
5
Categorie Soggetti
Engineering,"Physics, Applied
Journal title
Nanotechnology → ACNP
ISSN journal
09574484
Volume
6
Issue
4
Year of publication
1995
Pages
135 - 138
Database
ISI
SICI code
0957-4484(1995)6:4<135:AMAITT>2.0.ZU;2-8
Abstract
Automatic mask alignment in the theta direction using moire sensors is reported, The relation between small angular displacement and linear displacement is clarified. A computer-controlled angular alignment sys tem is developed. A desired alignment position is easily set by a comp uter. In our experimental condition, angular accuracy of the order of +/-4 x 10(-7) rad is realized by automatic computer control.