ENERGY-DISTRIBUTION OF ELECTRONS AND IONS BOMBARDING ELECTRODES IN HIGH-FREQUENCY DISCHARGES

Authors
SMIRNOV AS USTAVSHCHIKOV AY FROLOV KS
Citation
As. Smirnov et al., ENERGY-DISTRIBUTION OF ELECTRONS AND IONS BOMBARDING ELECTRODES IN HIGH-FREQUENCY DISCHARGES, Zurnal tehniceskoj fiziki, 65(8), 1995, pp. 38-50
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
Zurnal tehniceskoj fiziki → ACNP
ISSN journal
00444642
Volume
65
Issue
8
Year of publication
1995
Pages
38 - 50
Database
ISI
SICI code
0044-4642(1995)65:8<38:EOEAIB>2.0.ZU;2-O