Ti-B-N coatings were deposited on W18Cr4V high speed steels by using E
B-ion plating with different boron contents. The chemical compositions
of the coating are Ti, B and N. It was found that Ti, B and N in the
coating are homogeneous, but there exists a diffusion zone at the coat
ing/substrate interface on the basis of the results of ion probe micro
analysis and Auger electron spectrometry. The boron content of the coa
ting is 3-16 at.% given by nuclear reaction analysis. The ratio of nit
rogen to titanium of the coating is about 1 given by electron probe mi
croanalysis. The microhardness (HV) of the coating is 35-45 GPa (load
of 0.25 N). The critical load of the coating using the scratch test is
12-14 N. The sliding friction coefficient of the coating on diamond s
tylus is 0.086-0.097 (load of 8.8 N). X-ray diffraction measurement sh
ows that the coating consists of f.c.c. TiN, simple orthorhombic TiB,
cubic BN and simple hexagonal Ti-B-N phases. As expected, the higher t
he boron content, the higher the content of cubic BN and TiB phases; a
nd the higher the microhardness, the lower the adhesion.