DEVELOPMENT OF A FLEXURE-HINGED TRANSLATION MECHANISM DRIVEN BY 2 PIEZOELECTRIC STACKS

This paper describes a monolithically constructed, flexure-hinged tran slation mechanism suitable for mechanical scanning stages of very high precision. Two piezoelectric stacks are employed to drive the mechani sm; one piezoelectric stack pushes whilst the other pulls the moving p latform. This push-pull drive system is effective for raising the natu ral frequency of the stage. The mechanism described in this paper func tions as both a guide for rectilinear motion and a mechanical amplifie r to amplify a limited output displacement of the piezoelectric stack. Static and dynamic characteristics of the mechanism are considered in detail, and design equations are presented. The validity of the desig n equations is confirmed by experiment. A brief description of the acc uracy of motion of the moving platform is included. It is demonstrated that a scan range of 60 mu m is achievable with a natural frequency a s high as 1175 Hz in the scanning direction.