ANALYSIS OF HYDROGEN AND PARAMAGNETIC DEFECTS IN A-SI-H AEROSOL-PARTICLES RESULTING FROM THERMAL-DECOMPOSITION OF SILANE

Hydrogen and paramagnetic centers contained in a-Si:H aerosol particle s, formed during thermal decomposition of silane are studied. The meth ods of IR spectroscopy, effusion of hydrogen, and ESR spectroscopy are used. For low temperatures of aerosol formation (T less than or equal to 833 K) paramagnetic centers with g approximate to 2.0051 are recor ded in aerosol particles. For high temperatures (T > 800 K) paramagnet ic centers with g approximate to 2.0055 are recorded. The obtained exp erimental results testify that the existence of paramagnetic centers w ith g approximate to 2.0051 is related to the presence of polysilane c hains. The existence of paramagnetic centers with g approximate to 2.0 055 is related to the presence of monohydride groups with the frequenc y of stretching vibrations near 2100 cm(-1) located on the surface of interconnected microvoids and microchannels. The quantitative relation s between the fractions of hydrogen present in various structural grou ps and IR absorptions in the corresponding regions of the IR spectra a re obtained.