BLUE LUMINESCENCE FROM SI-IMPLANTED SIO2-FILMS THERMALLY GROWN ON CRYSTALLINE SILICON()

Authors
LIAO LS BAO XM ZHENG XQ LI NS MIN NB
Citation
Ls. Liao et al., BLUE LUMINESCENCE FROM SI-IMPLANTED SIO2-FILMS THERMALLY GROWN ON CRYSTALLINE SILICON(), Applied physics letters, 68(6), 1996, pp. 850-852
Citations number
19
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
68
Issue
6
Year of publication
1996
Pages
850 - 852
Database
ISI
SICI code
0003-6951(1996)68:6<850:BLFSST>2.0.ZU;2-M
Abstract
Si ions were implanted into thermally grown SiO2 films on crystalline Si at an energy of 120 keV and with a dose of 2 x 10(16) cm(-2). Under an ultraviolet excitation of similar to 5.0 eV, the implanted films e xhibit blue luminescence with a peak of similar to 2.7 eV at room temp erature. The blue emission is caused by oxygen vacancies in the films. (C) 1996 American Institute of Physics.