ATOMIC-FORCE MICROSCOPY FOR HIGH-SPEED IMAGING USING CANTILEVERS WITHAN INTEGRATED ACTUATOR AND SENSOR

A cantilever with an integrated ZnO piezoelectric actuator in feedback with a piezoresistive sensor is utilized in an atomic force microscop e (AFM) to achieve a new high speed imaging technique. The imaging ban dwidth is increased from 0.6 to 6 kHz by bending the cantilever over s ample topography with the actuator rather than moving the sample with a 2 in. piezotube. Images taken in the constant force mode with a 3 mm /s tip velocity of a sample containing 2 mu m vertical steps are prese nted. The effects of electrical coupling from the actuator were elimin ated by measuring the piezoresistor sensor with a lock-in amplifier. ( C) 1996 American Institute of Physics.