FABRICATION OF 3D PROXIMITY COUPLED JOSEPHSON-JUNCTION ARRAYS

Authors
HERBERT ST GOMEZ LB MAST DB NEWROCK RS WILKS C FALCO CM
Citation
St. Herbert et al., FABRICATION OF 3D PROXIMITY COUPLED JOSEPHSON-JUNCTION ARRAYS, Superlattices and microstructures, 18(1), 1995, pp. 53-57
Citations number
6
Categorie Soggetti
Physics, Condensed Matter
Journal title
Superlattices and microstructures → ACNP
ISSN journal
07496036
Volume
18
Issue
1
Year of publication
1995
Pages
53 - 57
Database
ISI
SICI code
0749-6036(1995)18:1<53:FO3PCJ>2.0.ZU;2-H
Abstract
Experimentally realizable 3D arrays of Josephson junctions have been a goal of researchers since 2D Josephson junctions (JJ) arrays were fir st introduced. In the past, it has proven to be technically impossible to manufacture 3D proximity-coupled arrays. Recent advancements in et ching technology have now made fabrication more feasible. Ln this pape r, we present details of our fabrication process. (C) 1995 Academic Pr ess Limited