Silicon flat profile double drift (DD) and double Read (DLHL) IMPATT d
iodes have been designed and fabricated, using a novel beamlead proces
s. The goal for the design of the active layer is a maximum negative r
esistance of the device for a given DC power density. Experimental res
ults are 225mW of RF power with DD diodes and 300mW for DLHL diodes, b
oth in the 140GHz range.