THE ENHANCED VOLTAGE-DIVIDING POTENTIOMETER FOR HIGH-PRECISION FEATURE PLACEMENT METROLOGY

Authors
ALLEN RA CRESSWELL MW ELLENWOOD CH LINHOLM LW
Citation
Ra. Allen et al., THE ENHANCED VOLTAGE-DIVIDING POTENTIOMETER FOR HIGH-PRECISION FEATURE PLACEMENT METROLOGY, IEEE transactions on instrumentation and measurement, 45(1), 1996, pp. 136-141
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
IEEE transactions on instrumentation and measurement → ACNP
ISSN journal
00189456
Volume
45
Issue
1
Year of publication
1996
Pages
136 - 141
Database
ISI
SICI code
0018-9456(1996)45:1<136:TEVPFH>2.0.ZU;2-Q
Abstract
Enhancements to the voltage-dividing potentiometer, an electrical test structure for measuring the spatial separations of pairs of conductin g features, are presented and discussed, These enhancements reduce or eliminate systematic errors which can otherwise lead to uncertainties as large as several hundred nanometers, These systematic errors, attri buted by modeling to asymmetries at certain intersections of conductin g features in the test structure, are eliminated by modifications to t he test structure and test procedures.