SPUTTERED THIN-FILM STRAIN-GAUGES FOR DIFFERENTIAL PRESSURE MEASUREMENT

Authors
NAYAK MM RAJANNA K GUNASEKARAN N MUTHUNAYAGAM AE MOHAN S RAM KM
Citation
Mm. Nayak et al., SPUTTERED THIN-FILM STRAIN-GAUGES FOR DIFFERENTIAL PRESSURE MEASUREMENT, IEEE transactions on instrumentation and measurement, 45(1), 1996, pp. 335-339
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
IEEE transactions on instrumentation and measurement → ACNP
ISSN journal
00189456
Volume
45
Issue
1
Year of publication
1996
Pages
335 - 339
Database
ISI
SICI code
0018-9456(1996)45:1<335:STSFDP>2.0.ZU;2-T
Abstract
A differential pressure transducer with sputtered gold films as strain gauges has been designed and fabricated. The construction details of the sensing element assembly are given. The details of the strain gaug e film configuration employed and the thin-film deposition process are also presented. Information on the output characteristics of the diff erential pressure transducer such as effect of pressure cycles on outp ut, thermal stability, bidirectional calibration results obtained and individual gauge stability is reported.