X-RAY-DIFFRACTION FROM A COHERENTLY ILLUMINATED SI(001) GRATING SURFACE

Authors
SHEN Q UMBACH CC WESELAK B BLAKELY JM
Citation
Q. Shen et al., X-RAY-DIFFRACTION FROM A COHERENTLY ILLUMINATED SI(001) GRATING SURFACE, Physical review. B, Condensed matter, 48(24), 1993, pp. 17967-17971
Citations number
17
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physical review. B, Condensed matter → ACNP
ISSN journal
01631829
Volume
48
Issue
24
Year of publication
1993
Pages
17967 - 17971
Database
ISI
SICI code
0163-1829(1993)48:24<17967:XFACIS>2.0.ZU;2-Y
Abstract
High-resolution synchrotron x-ray diffraction from a Si(001) grating s urface reveals resolution-limited grating interference peaks around ea ch Bragg reflection. The peaks can be explained by kinematic scatterin g theory using the concept of a grating form factor. The positions and the intensities of the satellite peaks yield structural information s uch as the period, the width, and the height of the gratings, as well as its shape and it's orientation and registry with respect to substra te lattice, and possible crystal strains.